SOD(Spin-on Dielectrics)

FOx-1x and FOx-2x Flowable Oxides

FOx®  Flowable Oxide is a flowable, inorganic polymer that is designed to meet industry demands for improved dielectric materials.  FOx Flowable Oxide is s direct replacement for low temperature CVD and SOG processes.   It is ideal for use as an interlevel dielectric in multilevel metal integrated circuit designs.

As Supplied - it is a liquid solution of hydrogen silsesquioxane in carier solvent

As Processed - it is a spun-on flowable polymer cured to a microporous amorphous film

Provides

• State of the art planarization
• Low dielectric constant
• Controlled film thickness
• Excellent gap fill
• very low defect density
• Choice of carrier solvent systems

	Product		Carrier Solvent		Thickness Range Å
	FOx-12		MIBK (methyl isobutyl ketone)		975-1970
	FOx-13		MIBK (methyl isobutyl ketone)		1740-3330
	FOx-14		MIBK (methyl isobutyl ketone)		2700-3500
	FOx-15		MIBK (methyl isobutyl ketone)		3800-4900
	FOx-16		MIBK (methyl isobutyl ketone)		5200-6700
	FOx-17		MIBK (methyl isobutyl ketone)		7000-9000
	FOx-22		VMS fluid blend (volatile methyl siloxane)		2400-3300
	FOx-23		VMS fluid blend (volatile methyl siloxane)		3200-4400
	FOx-24		VMS fluid blend (volatile methyl siloxane)		4300-6000
	FOx-25		VMS fluid blend (volatile methyl siloxane)		5800-8100

Technical Data

Download Data Sheet (PDF size = 64 KB)

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