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저유전(low-k) SOD(spin-on dielectric)의 검증된 품질 및 성능을 토대로 한 응용 솔루션. 다우코닝의 실리콘 제품,
서비스 및 기술을 선택하십시오.
고객의 요구에 꼭 맞는 통합 솔루션을 제공합니다.
| 종류: Inorganic Polymer |
물리적인 형태: As Supplied: Liquid solution of hydrogen silsesquioxane in carrier
solvent
As Processed: Spun-on flowable polymer cured to a microporous amorphous
film |
| 특성: State-of-the-art planarization; low dielectric constant; controlled film
thickness; excellent gap fill; very low defect density; choice of carrier
solvent systems |
| 잠정적인 사용 Interlevel dielectric material in multilevel metal integrated circuit
designs |
| Technical Data | Download Datasheet
PDF | Tutorial |
|
| 종류: Inorganic Polymer |
물리적인 형태: As Supplied: Liquid solution in carrier solvent
As Processed : Spun-on flowable polymer cured to a SiO2- like film |
| 특성: Void-free gap fill; controlled film thickness; very low defect density; low
metalic impurities; choice of carrier solvent systems |
| 잠정적인 사용 Spin-on gap fill of shallow trench isolation structures at and below 65nm
technology nodes |
| Technical Data | Download Datasheet PDF | Tutorial |
|
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